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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
7O-8 User’s Manual
Figure 7O-5. Agilent 10737L/R Compact Three-Axis interferometers — beam paths
REFERENCE PATH (f
A
)
F
r
o
m
L
ase
r
Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
COMPOSITE (f
A
) and (f
B
)
MEASUREMENT PATH (f
B
)
M
eas
u
r
e
m
e
n
t
M
i
rr
o
r
λ
/
4
P
l
a
t
e
F
r
o
m
L
ase
r
=
f
A
f
A
f
A
f
A
=
f
B
=
f
A
a
nd
f
B
=
Rounded corners are used to help you trace paths.
LEGE
ND
R
e
f
e
r
e
n
ce
M
i
rr
o
r
λ
/
4
P
l
a
t
e
Axis #2
Axis #3
Axis #1
Axis #2
Axis #3
Axis #1
Axis #1 = f
B
±2 f
1
Axis #2 = f
B
±2 f
2
Axis #3 = f
B
±2 f
3
∆
∆
∆
Axis #1 = f
B
±2 f
1,
Axis #2 = f
B
±2 f
2,
Axis #3 = f
B
±2 f
3,
∆
∆
∆
f
B
NOTE: Because the Measurement
mirror may have a combination of
displacement, pitch, and yaw motions,
the Measurement Axes may have
different Df values, as shown
Axis #1 = f
A
Axis #2 = f
A
Axis #3 = f
A
f
A
M
eas
u
r
e
m
e
n
t
M
i
rr
o
r
Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
M
eas
u
r
e
m
e
n
t
M
i
rr
o
r
λ
/
4
P
l
a
t
e
F
r
o
m
L
ase
r
R
e
f
e
r
e
n
ce
M
i
rr
o
r
Axis #2
Axis #3
Axis #1
f
B
R
e
f
e
r
e
n
ce
M
i
rr
o
r