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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Special Considerations
7O-10 User’s Manual
Figure 7O-6A. Agilent 10737L Interferometer — beam patterns
In
te
rf
e
r
o
m
ete
r
In
p
ut Fac
e
FROM
LASER
HEAD
68.92
(2.71)
B
otto
m
of
in
te
rf
e
r
o
m
ete
r
as
s
h
o
wn i
n
specification
drawing
A
G
ILENT 1
0
7
3
7L THREE-AXI
S
INTERFER
O
METER
G
ENERAL N
O
TE
S:
1. F
o
r E
ac
h Axi
s:
2. Drawing not to scale.
MP = M
easu
r
e
m
e
n
t
P
o
in
t
D
a
rk
e
r B
eam
In
d
i
cates
P
rimar
y
Measurement bea
m
14.
38
mm
(
0.566
)
7.1
9
mm
(
0.283
)
7.1
9
m
m
(
0.283
)
1
0
.11 m
m
(
0.39
)
2
0
.
90
mm
(
0.83
)
24.4
9
m
m
(
0.964
)
MP1
See Note 1
MP2
S
e
e
N
o
t
e
1
MP3
S
ee Notes 1
&
2
Axis No.1
Out
p
u
t
Axis No.2
Output
Axi
s
N
o
.
3
Out
p
u
t
Input fo
r
all axes
Laser Beam turns left
(viewed from top).
Measurement Mirror
From
Laser Head
17.
3
m
m
(
0.68
)
1
0
7
3
7
L
3
-
A
X
I
S
I
N
T
E
R
F
E
R
F
E
R
O
M
E
T
E
R
S
econdar
y
Measurement bea
m
10737L