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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
7O-16 User’s Manual
Procedure
Planning the measurement setup
Determine the general plan for your measurement. Examples of
measurement setups are given throughout this manual. Particularly,
your plan should address:
1. Which axes you want to measure, and what measurements you
want to make,
2. Where the interferometers will be positioned with respect to the
stage mirrors,
3. Where the laser head will be positioned and how the laser beam
will be delivered to the interferometers, and
4. Making sure you will have enough laser power to drive all receivers
in your measurement system.
Good practice defines the plane and direction of all beam paths against
machined surfaces known to be parallel or perpendicular to the stage
plane.
You may need to provide special mounting arrangements for the laser
head and the optics in order to place the measurement beams where
you want them on the stage mirrors.
Initial installation and setup
1 Install the laser head, the beam-steering optics, and the beam-splitting
optics in their general locations, as specified in your plan. The
interferometer(s) will be installed after the beam paths have been
established as described below.
2 Turn on power to the laser head and select the laser head’s small
output aperture.
3 Refer to Chapter 4, “System Installation and Alignment,” in this
manual, beginning with the “Alignment principles” section, for
additional information about aligning your measurement setup.