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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Operation
User’s Manual 7O-23
Operation
Measurements
For an interferometer setup to measure distances along the X-axis,
measurements of displacement, pitch, and yaw are derived as
described below. These computations are done via software on the
system controller or computer.
Displacement
For the Agilent 10737L/R interferometer, displacement along the
X-axis can be measured as the average of the data returned from
measurement axis #1 and measurement axis #2.
Pitch
For the Agilent 10737L/R interferometer, pitch (rotation about the Y
axis) can be measured using data returned from all three measurement
axes, and the vertical offset between the common centerline of
measurement axes #1 and #2 and the centerline of measurement
axis #3 (7.19 mm, or 0.283 inch).
Yaw
For the Agilent 10737L/R interferometer, yaw (rotation about the
Z axis) can be measured as the difference between the data returned
from measurement axis #1 and measurement axis #2, divided by the
distance between them (14.38 mm, or 0.566 inch).
Error
The deadpath distance for an Agilent 10737L/R interferometer is the
distance between the interferometer’s measurement face and the
measurement mirror, at the measurement “zero” position. This is the
same as for the Agilent 10706B interferometer, on which it is based.
Displacement
measurement axis #1 + measurement axis #2
2
---------------------------------------------------------------------------------------------------------------=
Pitch
D
i
sp
l
acement measurement ax
i
s #
3
–
7.19 mm or 2.83inch
--------------------------------------------------------------------------------------------------
radian=
Yaw
measurement ax
i
s#
1
measurement ax
i
s #
3
–
14.38 mm or 0.5666 inch
----------------------------------------------------------------------------------------------------------------------
radian=