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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Installation and Alignment
7O-14 User’s Manual
Table 7O-1. Tools and Equipment Required or Recommended
Item and Description Mfr. Part Number (Mfr =
Agilent unless otherwise
indicated)
Comment, Note, etc.
Penta prism or similar prism that bends
light exactly 90 degrees
Prisms of this type are available
from scientific or optical supply
shops
Recommended, but not required.
For setting up right angles in the
beam paths from the laser head to the
interferometers.
An Agilent 10777A Optical Square
may be used.
True square L.S. Starret, Athol, Mass. Recommended, but not required.
For setting up beam paths parallel to
or perpendicular to machine surfaces
that are parallel to or perpendicular to
the stage mirrors.
Washer, lock, 0.115 in id, 0.270 in od,
internal tooth; qty = 6
2190-0004 Supplied with Agilent 10737L/R
Interferometer.
Screw, cap, 4-40, 0.500 in lg, hex trim
head 0.187 in (3/16 in) across flats; qty =
2
2940-0269 Supplied with Agilent 10737L/R
Interferometer.
Screw, machine, 4-40, 1.75 in lg, pan
head, pozidriv; qty = 6
2200-0127 Supplied with Agilent 10737L/R
Interferometer.
Screw, socket head cap, 4-40, 0.250 in
lg, hex recess 0.094 in (3/32 in) across
flats; qty = 2
3030-0253 Supplied with Agilent 10737L/R
Interferometer.
Screw, socket head cap, 2-56, 0.187 in
lg, 0.064 in radius oval point, hex recess;
qty = 2
3030-0983 Supplied with Agilent 10737L/R
Interferometer.
Hex key, 5/64 in (0.078–in) 8710-0865 Supplied with Agilent 10737L/R
Interferometer.
Hex key, 3/32-in (0.094 in) 8710-0896 Supplied with Agilent 10737L/R
Interferometer.
Wrench, 3/16-in open-end 8710-1740 Supplied with Agilent 10737L/R
Interferometer.
Used to secure the Agilent 10711A
Adjustable Mount.
Alignment Aid 10706-60001 Supplied with the Agilent 10737L/R
Interferometer.
See Figure 7O-7 for illustration.
Alignment Aid 10706-60202 Supplied with the Agilent 10737L/R
Interferometer.
See Figure 7O-7 for illustration.