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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Special Considerations
User’s Manual 7O-11
Figure 7O-6B. Agilent 10737R Interferometer—beam patterns
A
G
ILENT 1
0
7
3
7R THREE-AXI
S
INTERFER
O
METE
R
FROM
LASER
HEAD
In
te
rf
e
r
o
m
ete
r
In
p
ut Fac
e
68.92
(2.71)
Bottom of
interferometer
as shown in
specification
drawing
MP1
See Note 1
MP2
S
ee Note
1
MP3
See
Notes 1 & 2
14.
38
m
m
(
0.566
)
7.1
9
m
m
(
0.283
)
7.1
9
m
m
(
0.283
)
1
0
.11 m
m
(
0.39
)
2
0
.
90
m
m
(
0.83
)
24.4
9
m
m
(
0.964
)
Axis No.1
Output
Axi
s
N
o
.
2
Output
Axi
s
N
o
.
3
Out
p
u
t
Input for
all axes
Laser Beam turns right
(viewed from top).
Measurement Mirror
From
Laser Head
17.
3
mm
(
0.68
)
1
0
7
3
7
R
3
-
A
X
I
S
I
N
T
E
R
F
E
R
F
E
R
O
M
E
T
E
R
GENERAL NOTES:
1. F
o
r E
ac
h Axi
s:
2. Drawing not to scale.
MP = M
easu
r
e
m
e
n
t
P
o
in
t
D
a
rk
e
r B
eam
In
d
i
cates
P
rimar
y
Measurement bea
m
S
econdar
y
Measurement bea
m
10737R