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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
User’s Manual 7O-7
Figure 7O-4. Measurement using two Agilent 10737R interferometers
Optical Schematics
Optical schematics for these interferometers are given in Figure 7O-5.
Each interferometer functions similarly to three parallel
Agilent 10706B High Stability Plane Mirror interferometers with a
three-way beam splitter in front of them.
To reduce thermal drift errors, the measurement and reference beam
paths have the same optical path length in glass. This minimizes
measurement errors due to temperature changes in the interferometer.
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ilent 10737R
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