• Large single-piece heater construction provides superior flatness
and temperature uniformity
• Material compatible for vacuum applications to 10-6 millitorr
• Operating temperature up to 550°C (1022˚F)
• Consistent part-to-part temperature uniformity
• UL
®
recognized under File E52951
Features
Interference Fit Construction (IFC) Heater
Assemblies
Watlow’s IFC heated parts are ideal for applications that require materials other than
aluminum or exceed the temperature capabilities of cast aluminum. IFC heaters
manufactured from alloys such as nickel, stainless steel, Incoloy
®
, aluminum and
copper may operate up to 700°C (1292°F). One of the primary advantages of IFC
heated parts over a milled groove approach or a brazed assembly is improved heater
life due to the intimate contact of the heater with the substrate. IFC heater
assemblies are ideal for physical vapor deposition, transparent conductive oxide
and other large photovoltaic equipment applications.
• Performance up to 700°C (1292°F)
• Materials including Inconel
®
, 304 and 316 stainless steel and nickel
• Tubular heater element and optional heat/cool tube
• Perpendicularity to better than 0.1 mm
• Flatness to 0.005 mm on 300 mm wafer chuck
Features
IFC heaters
Large panel
IFC heaters
FIREROD
cartridge
heaters
Heater Solutions - 3
FIREROD
®
High Performance Cartridge
Heaters
Watlow’s FIREROD
®
high performance cartridge heaters provide superior heat
transfer, uniform temperature and resistance to oxidation and corrosion, even at high
temperatures. Watlow’s applications expertise is used to design special heaters that
meet precision photovoltaic equipment specifications including high vacuum and
atmospheric applications. Available in both imperial and metric sizes, FIREROD is
one of the most versatile and widely used cartridge heaters. The superior
construction and operating characteristics of the FIREROD makes it the industry
standard.
• Miniature size down to 3.2 mm (0.125 in.)
• Low mass for better heat transfer and quicker response time
• Swaged construction for higher watt density and process temperature
• Internal thermocouple for space-restricted applications
• UL
®
and CE approval on most configurations (contact factory for specifics on
agency approvals)
Features
