• Self regulation saves time and money, decreases the number of
control loops and eliminates over-temperature concerns
• Patent-pending modular design provides quick prototype and
delivery
• Easy installation of the assembly to a custom gas line
• Temperature-compensating construction adjusts for variations in
heat loading yielding impr
oved temperature uniformity
• Temperature uniformity as good as +/- 5°C (9°F)
• Constructed of non-contaminating materials
• Meets SEMI S2 requirements, UL
®
component recognition pending and
RoHS compliant
Features
High Performance Gas Line Heaters
Precision heating of valves, mass flow controls (MFC), filters and other gas
line components is critical to process performance. Watlow’s high
uniformity temperature solutions start with thermal profiling of the gas
lines in order to understand the thermal gradients resulting from
component mass, material and physical orientation. The standard and
custom modeled silicone rubber gas line heater solution results in a
thermal system that meets thermal and mechanical specification.
• Even heating up to 200°C (392°F) for uniform temperature
pr
ofiles
• Insulated straight fillers for 100 percent line coverage
• Cleanroom compatible silicone rubber construction
• Fire-safe UL
®
94-HB or UL
®
-VO material
• UL
®
, CE, Semi S2
Features
RELIALINE
™
Heating System
Watlow’s RELIALINE
™
heating system is the first modular line heater that can be
quickly delivered and easily installed in high performance applications. The
RELIALINE heater provides precisely controlled heat distribution and is automatically
self regulating to deliver excellent temperature uniformity. The temperature
compensation feature allows for the system to increase wattage in cooler regions
and decrease the power in warmer zones thus improving the temperature uniformity
of the entire line. RELIALINE’s ability to self compensate can balance temperature in
various areas along the line that traditionally would have needed additional areas of
control. This feature decreases the required number of control loops thus decreasing
component costs and installation time. This specially designed heating system
heats each fitting with the same self-regulating heater materials used on
straight lines. Older gas line heaters had size limitations which often meant
that the elbows and tees were just insulated. With heated fittings, the
RELIALINE greatly increases the temperature uniformity along a line.
RELIALINE
heating system
RELIALINE
heating system
components
RELIALINE
over weldment
Heater Solutions - 1
High performance
gas line
heaters